Abstract
The work introduces the first MEMS Lorentz-force magnetometer that both includes multiple current recirculation loops and combines in a single, low-footprint ( $\mu \text{A}_{\text {rms}}$ sinewave current delivered from an MEMS-based oscillator, the sensor reaches on all axes noise levels of 100 nT/ $\surd $ Hz over a 50-Hz 3-dB bandwidth, with a full-scale range of ±7 mT and 0.1% nonlinearity. Cross-axis contributions, inherently higher than in separate-axis sensors, are linearly compensated to less than 1.5%. [2018-0056]
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