Abstract

In contrast to the commonly employed high temperature chemical vapor deposition growth that leads to multilayer graphene formation by carbon segregation from the bulk, we demonstrate that below 600 °C graphene can be grown in a self-limiting monolayer growth process. Optimum growth is achieved at ∼550 °C. Above this temperature, carbon diffusion into the bulk is limiting the surface growth rate, while at temperatures below ∼500 °C a competing surface carbide phase impedes graphene formation.

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