Abstract

Calibration is required to maximize the sensitivity and measurement accuracy of vibration sensors. In this study, a low-frequency vibration calibration method is proposed that is based on the concept of monocular vision. In this method, we employ a high-accuracy edge extraction method to extract the edges of sequential images so as to obtain the high calibration accuracy. However, the proposed method must rely on a long-stroke shaker to provide vibration excitation to the sensor, and the bending in the guideway caused by the mechanical processing reduces the calibration accuracy, especially at very low frequencies. The proposed setting compensates for the bending using an additional monocular vision technique to significantly improve the calibration accuracy. To validate the calibration accuracy of the proposed method, a comparison was conducted between results obtained via the laser interferometry, the Earth's gravitation method, and the proposed method when applied to calibrate the sensitivity of a tri-axial acceleration sensor at frequencies between 0.04 and 8 Hz. The results of the comparison showed the proposed method calibrated the sensor sensitivity with high accuracy and was able to accurately account for the bending when the frequency was lower than 0.3 Hz. In contrast, the calibration accuracy of the laser interferometry decreased because of the bending.

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