Abstract
In a scanning transmission electron microscope (STEM), the elemental analysis at atomic resolution is realized by the combination with electron energy-loss spectroscopy (EELS), since an aberration corrected probe forming lens system enables us to obtain an electron probe sized about 0.1 nm [1]. In EELS, the energy resolution is mainly limited by the energy spread of the electron source, which is approximately 0.7 ~ 1.0 eV for a Schottky source and 0.3 ~ 0.5 eV for a cold field emission source. For the analysis of a detailed electronic state at an atomic scale at higher energy resolution, we developed a monochromator for an aberration-corrected STEM, which integrates a double Wien-filter system. [2]
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