Abstract

Properties of diamond-like carbon films deposited by a new method in a supersonic flow of hydrocarbon plasma generated by a disk-type magneto-hydro-dynamic accelerator were studied. Two methods are used for optical and structural characterization of diamond-like carbon films: nondestructive spectroscopic ellipsometry and Raman spectroscopy.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call