Abstract
A sensor for the determination of fluorine and hydrogen fluoride in gases has been developed. Lanthanum fluoride and platinum are used as the gate materials in a field-effect device with silicon in direct contact with the ionic conductor. The determination of both gases is possible at room temperature in the ppm concentration range. The response time of the sensor is of the order of some minutes. Oxygen, which can also be determined with a similar sensor system, does not interfere. The influence of thermal activation is proved to be different for the two analytes. Selectivity for HF and F 2 can be achieved because of a very high difference in the gate voltage in both gases and the influence of the on-chip activation process.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
