Abstract
Acoustic properties of amorphous SiO2 thin films deposited on the Si(100) substrate were investigated by using Brillouin spectroscopy. The Brillouin spectrum was obtained by tilting the sample to investigate both the longitudinal acoustic (LA) mode and the surface acoustic wave (SAW) modes. Sound velocities of both modes, the two elastic moduli (longitudinal and shear moduli), and the Poisson ratio of the film could be obtained by combining the Brillouin data and the measured refractive index. The longitudinal sound velocity and the longitudinal elastic modulus increased with increasing Ar ratio in the Ar:O2 gas mixture, which was attributed to the better stoichiometry of the film grown at higher Ar ratio.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
