Abstract
We report a real-time monitoring system for conducting atomic force microscopy (C-AFM) spectroscopy measurements. This system can capture not only electrical characteristics but also the conditions (torsional displacement and vertical displacement) of the cantilever, which plays the role of the electrodes, simultaneously and can distinguish current fluctuation due to the degradation of test specimens from current fluctuation due to accidental position change. Therefore, this system is suitable for long-term measurements, such as dielectric breakdown (BD) tests on SiO2 gate oxide films. The details of the system and its effectiveness are demonstrated.
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