Abstract
We report on the fabrication of molybdenum (Mo) nanopillar (NP) arrays with NP diameters down to 75 nm by means of deep-reactive ion etching at cryogenic temperatures. A variable-thickness Mo metal layer sputtered onto a Si3N4/Si substrate makes possible NPs with different lengths in a controllable manner. We demonstrate how our fabrication strategy leads to tunable cross-sections with different geometries, including hexagonal, cylindrical, square and triangular shapes, by using electron beam lithography on hydrogen silsesquioxane negative tone resist. To ensure well-defined facets and surfaces, we employ deep-reactive ion etching in a gas mixture of SF6 and O2 at cryogenic temperatures in an inductively coupled plasma reactive ion etching (ICP-RIE) system. These results represent an attractive route towards the realization of high-density Mo NP arrays for applications from nanoelectronics to quantum sensing and hydrogen evolution reaction catalysis.
Highlights
One-dimensional (1D) Molybdenum (Mo) nanostructures have garnered significant attention recently due to their potential uses in a wealth of applications from interconnects in nanoelectronic devices to promoting the hydrogen evolution reaction [1,2,3,4,5,6]
We report on the fabrication of molybdenum (Mo) nanopillar (NP) arrays with NP diameters down to 75 nm by means of deep-reactive ion etching at cryogenic temperatures
We have demonstrated the feasibility of a novel strategy for the top-down large-scale fabrication of geometric arrays of Mo NPs with different cross-sectional shapes as well as of nanocones
Summary
One-dimensional (1D) Molybdenum (Mo) nanostructures have garnered significant attention recently due to their potential uses in a wealth of applications from interconnects in nanoelectronic devices to promoting the hydrogen evolution reaction [1,2,3,4,5,6]. This potential stems from their remarkable properties, such as efficient electron emission and structural stability. These approaches have some limitations in terms of scalability as well as concerning the control on the orientation, shape, and density of the 1D nanostructures at spatially well-defined locations
Sign-in/Register to view highlights & summary 
Published Version (
Free)
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Physica E: Low-dimensional Systems and Nanostructures
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
