Abstract
ABSTRACTWe report on the growth of molybdenum and vanadium oxide films, i.e., MOO3, V205, and V6013, and their application as positive electrodes in lithium microbatteries. We have characterized various polycrystalline samples and studied how their structural and electrical properties are affected by the different preparation conditions. The highest quality films were grown on silicon substrate maintained at 250°C and annealed at 300°C. It is shown that the growth conditions play an important role in the electrochemical properties of the film. Both thermodynamic and kinetic parameters are strongly dependent on film morphology and stoichiometry. Microbatteries fabricated with cathodes formed at moderate temperature have shown a volumetric capacity about 80 μAh/μm/cm2. The cells exhibit a monotonous discharge profile indicating that the cathode materials remain single phase even for a large degree of intercalation.
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