Abstract
In this study, the principle of operation of the new type of vacuum pumps - molecular-viscous vacuum pump (MVVP), that provides vacuum system evacuation in a wide pressure range, - is described. Despite such a wide range of operation of the pump, the main area of it’s application is the molecular-viscous regime of gas flow, also called the transition regime of gas flow. Comparison of the developed vacuum pump with two-rotor pumps and vortex pump with the same geometric parameters allows one to conclude the qualitative operating of the pump and the higher evacuating parameters in the studied pressure range.
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