Abstract

The mechanical reliability of hybrid films depends critically on their fracture properties which are controlled largely by the film composition and molecular structure. We have investigated the adhesive and cohesive fracture properties of hybrid films processed from 3-glycidoxypropyltrimethoxysilane (GPTMS) and tetra n-propoxyzirconium (TPOZ), for which the roles of molecular structure and composition have not been well established. The influences of film Zr/GPTMS ratio, silane crosslinking, and substrate composition on fracture resistance were quantified in terms of the critical strain energy release rate, GC Film fracture energy was found to increase, then decrease with increasing Zr/GPTMS ratio. Removal of the epoxy rings of GPTMS from the film was found to drastically decrease the cohesive fracture energy of the film as well as the adhesive fracture energy of the film/epoxy interface. Finally, films deposited on silicon had much higher fracture energies compared to those deposited onto aluminum and titanium from identical sols. FTIR, XPS, and AFM were used to characterize the film structure and fracture surfaces. The molecular-scale mechanisms responsible for the observed trends are discussed. These results provide new insights into the interaction between the substrate chemistry, molecular structure, and mechanical reliability of hybrid sol-gel films.

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