Abstract
ABSTRACTBy virtue of their shape selectivity and stability, molecular sieves are ideal components for discriminating chemical sensors. In this paper we report the preparation of capacitance type sensors based on aluminum phosphate molecular sieves. Thin films of the molecular sieves AlPO4-5, A1PO 4-H3 and AlPO4-H1, which cover a range of pore dimensions, were deposited on titanium nitride coated silicon wafers by laser ablation. A subsequent hydrothermal treatment followed by a Pd/Au coating and the application of standard photoresist/masking techniques were used to generate the capacitors. The molecular sieves exhibit significant changes in capacitance upon exposure to target molecules, including CO2, CO, N2, H2O and toluene.
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