Abstract

Modern sensors are becoming increasingly small in size while their sensitivity requirements remain relatively strict, to the point that the processing technology and test technology are highly difficult and costly. This paper proposes a micro-resonant biosensor with adjustable natural frequency. A positive feedback signal with a phase difference of 180 degrees is used to reduce the equivalent mass of the resonator, yielding an ultrahigh resonant frequency. The biosensor is formed by a coating bovine blood solution on the surface of the resonator of a cantilever sensor. The instantaneous frequency equation of the biosensor is established using a coupling dynamic calculation. The changes in instantaneous frequency during hemoglobin oxygen absorption and deoxygenation, are then measured. The proposed millimeter micro-resonant biosensor system measures the molecular weight of a single oxygen molecule quality at 5.7619×10−23 g, only deviating by 8.306 % from the theoretical value. Finally, the potential of the micron scale sensor is deeply taped.

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