Abstract
This chapter gives a comprehensive survey on molecular layer deposition (MLD) processes for growing organic–inorganic hybrid materials. We summarize these MLD processes with their precursors, surface chemistry, growth characteristics, and film properties. The hybrid materials via MLD cover metalcones, luminescent materials, energy materials, metal-organic frameworks, organic magnetic materials, and nanolaminates. We expect that this Chapter enables to provide readers some basics of MLD and helps readers form an integral picture on MLD progresses on hybrid materials.
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