Abstract

SummaryTailored organic thin films with designated molecular arrangements are expected to provide a variety of photonic/electronic devices due to their ability to optimize the performance or to generate new functions by controlling the electron wavefunction shapes. Molecular Layer Deposition (MLD), which enables monomolecular‐step organic film growth, is one of the promising fabrication processes of tailored organic thin films. In the present report, first, the concept and an experimental demonstration of MLD are described. Next, after three featured capabilities of MLD, namely, ultra‐thin/conformal, tailored, and selective organic film growth are presented, applications of MLD based on these capabilities are reviewed, emphasizing polymer multiple quantum dots we have developed. Finally, conceptual proposal of MLD for the molecular targeted drug delivery for cancer therapy is suggested.

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