Abstract

Layer-by-layer growth of SrTiO 3 and BaTiO 3 films was achieved by laser molecular beam epitaxy (laser MBE) using SrTiO 3 (100) substrate with alomieally Hat terraces and 0.4 nm steps. Fine streak pattern and intensity oscillation were persistently observed by reflection high-energy electron diffraction (RHHED) during the film growth under optimized conditions. When the growth was halted at any levels of RHEED intensity, there was no substantial change in the intensity, which means the growth in a two-dimensional (2-D) layer-by-layer mode without step flow. From the atomic force microscopy (AFM) analysis, it was found that the RHEED oscillation period agreed with the growth time of a molecular layer [MO TiO 2 (M = Sr or Ba)] and the oscillation resulted from the periodic change of surface roughness by 2-D epitaxial growth on the terrace.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.