Molecular dynamics study of the effects of machining tool shape on the nanotribology and interfacial behavior of diamond-like coatings on silicon substrates

Abstract

The tribology and interfacial transformation of a diamond-like carbon film covering a silicon substrate are investigated in this research. The results show that the graphitization process causes additional graphite-like atoms to form during the machining process. Furthermore, increasing the substrate temperature may result in a significant rise in the local temperature zone and the number of graphite-like atoms. Besides, a higher silicon-dope percentage in the film reduces stress-induced and raises substrate temperature. The block tool creates a higher plastic deformation level with pile-up and protrusion than the hexagonal tool, but a shorter stress-induced zone and subsurface damage. The spherical tool, on the other hand, causes less plastic deformation but a deeper stress-induced zone and subsurface damage.