Abstract
Diamond-like carbon films have been extensively studied over the past decades due to their unique combination of properties, in particular, Si-DLC films are of significant interest for tribological effects. They possess the potential to improve wear performance in humid atmospheres and at higher temperatures. MD simulations were carried out to generate Si-DLC films at different silicon contents from 0 to 50%, in order to theoretically investigate the influence of silicon contents on microstructures and tribological properties between Si-DLC films. The results show that the sp3/sp2 ratio in Si-DLC films increases with the increasing silicon content. The MD simulation results suggest that the friction force increases with addition of silicon to DLC films. The bond numbers of interfilms have showed that the silicon addition promotes the bonding of interfilms forming, which results in the friction force increased.
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