Abstract
The erosion of amorphous hydrocarbon films by bombardment with argon ions and simultaneous exposure to thermal atomic hydrogen is studied as a function of ion energy and hydrogen/argon flux ratio by molecular dynamics simulations using a reactive hydrocarbon potential and compared with experimental data. While erosion due to energetic argon only is dominated by physical sputtering, the additional presence of atomic hydrogen leads to a marked increase of erosion. The erosion yield increases with both hydrogen/argon flux ratio and energy. A mechanism has been identified which explains the experimentally observed increase of the sputtering yield for simultaneous bombardment: the surface erosion induced by momentum transfer processes is enhanced by screening effects of the additionally offered hydrogen in the near-surface region.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
