Abstract
The role of molecular dynamics simulations as a tool for understanding the interaction of energetic particles with crystal surfaces is discussed. The simulations can be used to describe the physical state of the surface after such interactions and the dynamic development of the resulting surface damage can be examined. The results of particle impacts depend on the energy, incidence angle of the projectile and the projectile and substrate species. We demonstrate that single impact craters can form on silicon while bumps are formed on graphite.
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