Abstract
On atomic scale, using molecular dynamics （MD） simulation, the influence of different ion-beam incident angles on the structure of diamond-like carbon （DLC） films was discussed in the process of ion-beam-assisted deposition （IBAD）. The study focused on the model of film surface, average density and SP3 hybridization fraction under different ion beam incidence angles. The results showed that horizontal kinetic energy of the incident atoms was enhanced by the oblique incident assist ions, thereby the horizontal migration of the C-atoms were also enhanced. The ratio of migration of C-atoms with ion-beam oblique incidence became greater than with verticalineidace, however, the density of the film and SP3 hybridization fraction became smaller. The effect of different ion-beam incident angle on the films structure varies with the variation of assistance/deposition atomic ratio （Ar/C） and incident energy. Thus films with different structures could be obtained when the incidence of ion-beam is oblique.
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