Abstract
We used molecular dynamics simulations to study bubble formation in confined water in Si and SiO2 nanochannels. Our simulations showed that surface wettability plays a major role in determining the mechanism type of bubble formation in confined geometry of nanofeatures. Hydrophobic Si surfaces and hydrophilic SiO2 surfaces led to heterogenous and homogenous bubble formation, respectively. Such observations can help in understanding cavitation effects during etching/cleaning processes of features at nano-scale dimensions.
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