Molecular Dynamic Simulation of the Effect of Initial Surface Temperature on Arc Erosion Due to Ion Bombardment

Abstract

This study focuses on the effects of initial surface temperature on arc erosion caused by ion bombardment. The simulation results show that higher surface temperature leads to a greater number of lost Cu atoms and an increased size of the erosion crater. This is due to the ability of the incident ions to have a greater sputtering yield at higher temperatures. Moreover, the Cu atoms tend to agglomerate and form clusters after ion bombardment while leaving the surface.