Molecular dynamic simulation of secondary ion emis- sion from an Al sample bombarded with MeV heavy ions

Abstract

Sputtering yields and kinetic energy distributions (KED) of Al atomic ions ejected from a pure aluminium sample under MeV silicon ion bombardment were simulated with the molecular dynamic method. Since the electronic energy loss Se is much higher than the nuclear energy loss Sn when the incident ion energy is as high as several MeV, the Se effect was also taken into consideration in the simulation. It was found that the simulated sputtering yield fits well with the experimental data and the electronic energy loss has a slight effect at incident ion energies higher than 4 MeV. The simulated secondary ion KED spectrum is a little lower in the peak energy and narrower in the peak width than that in the experiment.