Molecular Beam Epitaxial Growth of InSb and AlSb Heterostructure on InSb Substrates

Jirapat Ounpipat,Suwit Kiravittaya,Visittapong Yordsri,Engrhyt Rattanawongnara,Aniwat Tandaechanurat,Somsak Panyakeow,Songphol Kanjanachuchai,Chanchana Thanachayanont,Suwat Sopitpan,Zon Zon,Somchai Ratanathammaphan,Noppadon Nuntawong,Supachok Thainoi

doi:10.1109/iciprm.2019.8819318

Molecular Beam Epitaxial Growth of InSb and AlSb Heterostructure on InSb Substrates

Jirapat Ounpipat, Suwit Kiravittaya + Show 11 more

https://doi.org/10.1109/iciprm.2019.8819318

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Publication Date: May 1, 2019

Affiliation: Chulalongkorn University, Naresuan University, Pathumthani University, National Science and Technology Development Agency, National Electronics and Computer Technology Center

#Reflection High Electron Energy Diffraction #Atomic Force Microscopy Observations + Show 8 more

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Abstract

Surface morphology of epitaxial InSb and AISb layers grown on (001) InSb substrate is reported. The growth is done by molecular beam epitaxy. Attempt to realize planar crystalline InSb layer is made. Preliminary promising results are obtained with in-situ reflection high electron energy diffraction and atomic force microscopy observations.

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