Abstract
For further applications microsystem technology needs a wider range of materials and processes suited to manufacture microstructures of high chemical resistance, medical compatibility and low friction. Therefore, the fundamentals of stepped-microstructure fabrication from fluorinated polymers were developed at Forschungszentrum Karlsruhe in cooperation with the Burkert GmbH & Co. company. It was the aim to enhance the applicabilities of the LIGA technique.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
