Abstract

Sensitivity and linearity are two crucial indices to assess the sensing capability of pressure sensors; unfortunately, the two mutually exclusive parameters usually result in limited applications. Although a series of microengineering strategies including micropatterned, multilayered, and porous approach have been provided in detail, the conflict between the two parameters still continues. Here, we present an efficient strategy to resolve this contradiction via modulus difference-induced embedding deformation. Both the microscopic observation and finite element simulation results confirm the embedding deformation behavior ascribed to the elastic modulus difference between soft electrode and rigid microstructures. The iontronic pressure sensor with high sensitivity (35kPa-1) and wide linear response range (0-250kPa) is further fabricated and demonstrates the potential applications in monitoring of high-fidelity pulse waveforms and human motion. This work provides an alternative strategy to guide targeted design of all-around and comprehensive pressure sensor.

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