Abstract
Highly accelerated lateral oxidation of the aluminum layer in a nanofilm processor may be achieved using an electrolyte supply distributed above the aluminum layer. Localized addition of electrolyte avoids the limitation of lateral oxidation due to the length-dependent increase in hydraulic resistance of the electrolyte channel. Lateral oxidation velocities in the new devices were 25 to 30mm per day compared to 5 to 10mm/day in the classical nanofilm processor. We developed a model to describe the experimental results and successfully predict the lateral oxidation behavior following modifications to the experimental setup.
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