Modulated IR radiometry of (TiSi)N thin films

Abstract

The thermal properties of (TiSi)N thin films deposited by dc reactive magnetron sputtering on steel have been measured using contactless modulated IR radiometry. To interpret the measured IR signals, a two-layer model has been applied, and to describe surface roughness effects related to the coatings' growth process, a three-layer model has been developed. Empirical correlations have been found between thermal transport properties and structural–physical parameters, e.g. the grain size and surface roughness of the coatings, and first correlations have additionally been found with the deposition conditions, e.g. the bias voltage.