Abstract
Large convex aspheric optical elements have been widely applied in advanced optical systems, which have presented a challenging metrology problem. Conventional testing methods cannot satisfy the demand gradually with the change of definition of "large." A modified method is proposed in this paper, which utilizes a relatively small computer-generated hologram and an illumination lens with certain feasibility to measure the large convex aspherics. Two example systems are designed to demonstrate the applicability, and also, the sensitivity of this configuration is analyzed, which proves the accuracy of the configuration can be better than 6nm with careful alignment and calibration of the illumination lens in advance. Design examples and analysis show that this configuration is applicable to measure the large convex aspheric surfaces.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
