Abstract
In the article, a simple method for the modification of the Stoney's equation was presented. The Stoney's equation is proposed from the assumption of equi-biaxial residual stresses in thin films. In this present method, biaxial stresses are different in x-axis and y-axis on thin film. The location of neutral axis depends on the material parameters and the film thickness. The finite element method (FEM) was used to simulate the thermal stress on the thin film. The results of the modified methods are compared with the results of FEM and other literatures. The present method is more accurate than the Stoney's equation in the evaluation of such films.
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