Modified FSIW Filter With $N$ Transmission Zeros Using BCB-Based MEMS Technology

Abstract

In this letter, a compact self-packaged folded substrate-integrated waveguide filter with loaded stubs is presented. Transmission zeros (TZs) at the same number of filter order are designed to improve out-of-band performance. The position of each TZ is controlled independently. The first spurious resonance increases by up to 3.8 times the fundamental frequency by suppressing the original first parasitic resonance. A Ka -band filter with a benzocyclobutene (BCB) polymer as a dielectric is fabricated and measured to verify the design concept.