Modifications of dielectric films induced by plasma ashing processes: Hybrid versus porous SiOCH materials

Abstract

This work focuses on the impact of oxidizing (O2) and reducing plasma ashing chemistries (NH3, CH4) on the modifications of dielectric materials in a porous or an hybrid state (SiOCH matrix+porogen). The plasma ashing processes have been performed on blanket wafers using O2, NH3, and CH4 based plasmas. The modifications of the remaining film after plasma exposures have been investigated using different analysis techniques such as x-ray photoelectron spectroscopy, infrared spectroscopy, x-ray reflectometry, and porosimetric ellipsometry. For the porous material the authors have shown that NH3 and O2 plasmas induce carbon depletion and moisture uptake while the CH4 plasma only leads to important carbon depletion without moisture uptake and to the formation of a thin carbon layer on the surface. For the hybrid material, no significant material modification is evidenced with the O2 plasma while an important methyl depletion and porogen degradation are observed with reducing chemistries such as CH4 and NH3 plasmas. The impact of the porogen on the film modification and the value of the dielectric constant will be presented and discussed.