Modification of the surface layers with plasma of a vacuum-arc discharge by controlling the energy of precipitating particles

Abstract

In this paper we consider one of the most effective ways to improve the performance properties of metals – their treatment by intense flows of metal plasma generated by a vacuum-arc discharge. The change in the thermal regime and the duration of the plasma treatment allows controlling both the thickness of a modified layer and the distribution of implanted ions into its depth. At the first stage of part processing the preliminary cleaning of the surface is carried out using a glow discharge in argon. In the second stage, vacuum-arc plasma sources are used, that provide surface treatment with ions of the sprayed material. To weaken and purify the plasma flow special separation systems were used to ensure the creation of an impassable barrier for the droplet fraction. Modification of the treated surface layer is achieved either due to the high energy of the deposited particles, or due to the implementation of the diffusion processes deep into the substrate. The presence of a modified surface layer allows improving the quality of the working coating that is deposited further.