Abstract

Fast atom bombardment (FAB) of asymmetric polyvinyltrimethylsilane (PVTMS) membranes by 1 keV Ar, or 1 keV He, or 0.8 keV H beams, with fluences of about 10 15 particles cm −2, resulted in a decrease in the transmembrane flux of various test gases (He, H 2, O 2, N 2, CH 4) and in a significant increase in the component selectivity. The pristine and the FAB-treated samples were studied by XPS and SIMS. According to XPS results, the FAB-treatment of the membranes led to an enrichment of carbon, while SIMS showed a simultaneous decrease in the hydrogen content in the surface layer, modified primarily on a nanometric scale.

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