Abstract
The formation of aluminum nitride precipitates using nitrogen ion implantation and the resulting changes of mechanical properties were studied. The modifications depended on the implantation parameters such as fluence, energy and temperature during implantation. Nitrogen implantation was carried out in pure aluminum for single and multi energy modes at various temperatures. The use of several energies during multi-step implantation allowed as to obtain a constant nitrogen concentration of about 130 nm as revealed by Rutherford backscattering spectroscopy (RBS). Grazing incidence X-ray diffraction (GXRD) indicated that hexagonal aluminum nitride was formed. The mechanical properties of nitrogen implanted in aluminum were studied by nanoindentation. Hardness and Young modulus depth profiles were analyzed in order to find the best implantation conditions for the improvement of the surface properties of aluminum.
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