Modification of a Field Emission Source SEM For Quantitative X-Ray Microanalysis

Abstract

Abstract We have modified a field emission source SEM in an attempt to obtain a quantitative x-ray microanalysis capability. This report describes how emission current instabilities, characteristic of cold field emission cathodes, were effectively circumvented. The technique involves integrating the electron beam current and terminating x-ray data acquisition at a selected value of integrated current. Working well in the current ranges available on most electron beam instruments, the scheme may be universally applicable to any charged beam instrument in which some event is, or can be made, dependent on the integrated beam current.