Abstract
A modernized setup for studying the ion-surface interaction is briefly described. The main ion channel implemented on the “Large MEPhI mass monochromator” with an ion energy range of 1–40 keV makes it possible to obtain ion beams with (EM/Z) ≤ 4000 keV × a.m.u. Operation with intermediate-energy hydrogen ions allows obtaining information on the thickness of layers of atoms with masses differing from substrate atoms, by analyzing energy spectra of protons scattered from two- or three-layer targets. The use of new digital power units and relevant control programs also allows automation of the ion beam control and makes it possible to perform ion-beam experiments using preliminarily developed irradiation programs.
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