Abstract
Models for analyzing squeeze film air damping depending on the oscillation mode of cantilever and double-clamped micro/nanobeam resonators are presented. The models are obtained from the damping theory of a rigid rectangular plate moving parallelly to a nearby object in viscous and molecular flow regime and electrostatic theory. The analysis results based on the models show that the influence of oscillation mode on squeeze film air damping in viscous regime is remarkably large compared to that in molecular flow regime. The damping in the first-order mode is larger than that in the high-order modes, while there is little deference in damping among the high-order modes. The damping of oscillation modes depends strongly on the oscillation amplitude and electrostatic spring softening. The obtained damping analysis models are useful for the optimal design of micro/nanobeam resonators and verifying the discrepancy between the theoretically calculated results and experiment data.
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