Modelling, Simulation and Dynamic Sliding Mode Control of a MEMS Gyroscope.

Yunmei Fang,Zhuli Yuan,Cuicui An,Wen Fu,Juntao Fei

doi:10.3390/mi12020190

Yunmei Fang, Zhuli Yuan + Show 3 more

Open Access

https://doi.org/10.3390/mi12020190

Copy DOI

Journal: Micromachines	Publication Date: Feb 13, 2021
Citations: 8	License type: CC BY 4.0

Affiliation: Hohai University

Abstract

An adaptive dynamic sliding mode control via a backstepping approach for a microelectro mechanical system (MEMS) vibratory z-axis gyroscope is presented in this paper. The time derivative of the control input of the dynamic sliding mode controller (DSMC) is treated as a new control variable for the augmented system which is composed of the original system and the integrator. This DSMC can transfer discontinuous terms to the first-order derivative of the control input, and effectively reduce the chattering. An adaptive dynamic sliding mode controller with the method of backstepping is derived to real-time estimate the angular velocity and the damping and stiffness coefficients and asymptotical stability of the designed systems can be guaranteed. Simulation examples are investigated to demonstrate the satisfactory performance of the proposed adaptive backstepping sliding mode control.

Highlights

Introduction of a microelectro mechanical system (MEMS) GyroscopeMicromachinesMicroelectro mechanical system (MEMS) gyroscopes can measure the sensor angular velocity of inertial navigation and guidance systems, widely used in aviation, aerospace, marine and positioning fields
Leland et al [7] proposed an adaptive control of a MEMS gyroscope using
Since no boundary layer is used in the dynamic sliding mode controller, chattering reduction can be obtained by using an integrator and the

Summary

Dynamic Model of MEMS Gyroscope

Since the angular rate is usually small compared to the natural frequency of the system and the proof mass is small, the centrifugal forces mΩ2z x, mΩ2z y, are assumed to be negligible or absorbed as part of the spring terms as unknown variations; the gyroscope undergoes rotation about the z axis only, and thereby Coriolis force acting on the plane perpendicular to z axis. Referring to [5], with these assumptions, the dynamics of the gyroscope become m 2z y , are assumed to be negligible or absorbed as part of the spring terms as unknown variations; the gyroscope undergoes rotation about the z axis only, and thereby Coriolis force acting on the plane perpendicular to z axis. The front subsystem must achieve stabilization purposes through the virtual control of the back subsystem

Design and Stability

Simulation Study