Abstract

This paper dedicated of introduction of dynamic model of improved mechanical system of sensor of atomic force microscope. The subject of the research is enhancement of dynamic characteristics of cantilever - main mechanical part of sensor. These characteristics defines frequency of oscillations of mentioned cantilever and are main limitations of the speed of scanning procedure of the microscope. Modification of original dynamic system of atomic force microscope made adding nonlinear additional stiffness, created by stream of compressed air. In order to determine dynamic characteristics of modified system there are necessary to create corresponding dynamic model. Parameters of such model were defined using experimental research and theoretically from 3-D model of microscope cantilever. Solution of this model brings dependencies between air gap, pressure of compressed air and oscillation frequency of cantilever. Finally, results there are presented and conclusions are drawn.

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