Abstract
A model of lift-off sputter deposition is developed taking into account the shadowing effect and incident angular distribution of the incoming flux of sputtered atoms. On the basis of this model, an SiO 2 microlens is fabricated by the lift-off technique with r.f. magnetron sputtering. The SiO 2 microlens is successfully applied to two-dimensional, free-space optical switching devices with low-loss fibre-to-fibre coupling. The model of lift-off sputter deposition is demonstrated to be very useful for the fabrication of microlenses.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
