Abstract
A model of lift-off sputter deposition is developed taking into account the shadowing effect and incident angular distribution of the incoming flux of sputtered atoms. On the basis of this model, an SiO 2 microlens is fabricated by the lift-off technique with r.f. magnetron sputtering. The SiO 2 microlens is successfully applied to two-dimensional, free-space optical switching devices with low-loss fibre-to-fibre coupling. The model of lift-off sputter deposition is demonstrated to be very useful for the fabrication of microlenses.
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