Abstract

Theoretical kinetic models of generation and growth of clusters and nanoparticles in low‐pressure plasma are briefly rewired. The relatively simple kinetic model is discussed more detail. Simple formulas and equations are given for monomer density; cluster dimension distribution; critical cluster dimension; rate of particle production; particle density and average dimension as well as plasma characteristics. The analytical formula is also obtained for the time delay of the measured LIPEE signal in the “Laser Induced Particle Explosive Evaporation” experimental method.

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