Modelling of cathodic arc PVD plasma flow in separator with non-uniform magnetic field

Abstract

A computer model of the Monte Carlo mass transfer of vacuum arc plasma through a magnetic separator of the dropping phase was developed and the calculation was made for a titanium cathode. It has been established that as a result of passing through the separator, titanium ions lose about 17% of energy due to elastic collisions, while less charged ions are subject to large relative energy losses. The calculated loss of the ionic component on the chamber walls is 90 % that corresponds to the experimental observations. A non-uniform magnetic field leads to a shift of the plasma flow to the walls of the separator, however, the position of the substrates along the height makes the greatest contribution to the unevenness of the concentration flow. It has been established that during the planetary rotation of the substrates, the overlap areas of the plasma flows are insignificant, while the plasma flow is present in all parts of the substrate motion, without the appearance of “shadow” zones.