Abstract
This chapter presents modeling and simulation of a low cost micropump with promising mass production. The micropump has a very simple structure and is therefore very cost effective. It consists of one plastic body, one metal diaphragm, and three piezo PZT ceramics. The PZT ceramics glued on the metal diaphragm form three actuators and so the metal diaphragm bonded with the plastic body constitute three chambers that are connected by interconnection channel in the plastic body. A three-dimensional finite element analysis (FEA) model including an electromechanical coupled field simulation is set up, and static analyses are preceded for different configurations under different applied voltages for understanding and optimization of the micropump performance. Simulation results reveal a significant dimensional design of piezo PZT actuators. The ratio of the thicknesses of the piezo PZT ceramics to the metal diaphragm and the piezo in-plane dimension necessary to obtain a higher stroke for maximizing the pumping effect and lowering maximum stress in the metal diaphragm for concerning reliability issue is given in the chapter.
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