Abstract
This work deals with electron microscope vacuum chambers pumping in specific low-pressure conditions with a supersonic flow. One part of an environmental scanning electron microscope is the differentially pumped chamber. Until now the only way to calculate a supersonic flow within such specific conditions of a low-pressure, was by using statistic calculation method Monte Carlo, which however does not require the environment to have a continuous character. This work compares results achieved using continuum method with results published by Dr. Danilatos, who used the Monte Carlo method for his calculations[1].
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