Abstract

A critical challenge for industrial Atomic Force Microscopes (AFM) is automatic selection of appropriate probes required for the scanning and measurement tasks (or sequences of tasks). This challenge can be addressed by specially assigned multi-probe cartridge holders with replaceable probes. Cantilevers with different spring constants and resonant frequencies are required to make specific AFM measurements. In this paper the classical PDE of lateral vibration of bars of variable cross-sections to model dynamics of the AFM cantilevers and calculate their spring constants is used. In addition, utilizing Rayleigh method, resonant frequency can be estimated. Using software based on these models, probe designer can interactively select appropriate geometric and material parameters to achieve desired spring constants and resonant frequencies of the cantilevers to be assembled in the multi-probe cartridge holders.

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