Abstract
Semiconductor manufacturing is among the most complicated and expensive operation systems encountered today and multiple cluster tool system has become an important technology in semiconductor manufacturing systems with the advantages of higher yields and shorter cycle times. Modelling and simulation has become a standard methodology in order to understand and predict performance of semiconductor manufacturing systems. Resources random failures during process execution are one major concern regarding system performance measured in terms of throughput and cycle time. This study aims to models and analyse random failures of processing modules of multiple cluster tool systems using coloured Petri net method. The impact of different input factors on system throughput and cycle time is presented.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: The International Journal of Advanced Manufacturing Technology
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
