Abstract
The piezoelectric-actuated flexure-based compliant platform is commonly adopted in many fields of micro and nanotechnology. In this paper, bond graph modeling, and kinematic and dynamic characteristics of a piezoelectric-actuated micro-/nano compliant platform system are investigated. During modeling, the bond graph model of the piezoelectric actuator (PZT) is derived by considering both the electrical domain and the mechanical domain. Considering the compliances of flexure hinges and elastic linkages, as well as the input ends, the bond graph model for the bridge-type displacement amplification mechanism in the compliant platform is established by combining pseudo-rigid-body (PRB) model theory and elastic beam theory. Based on the interactions between the PZT subsystem and compliant platform subsystem, the kinematic performance of the proposed compliant platform system is evaluated through both computer simulations and experimental tests. Furthermore, the frequency responses, dynamic responses and load capacity of the compliant platform system are studied. This paper explores a new modeling method for a piezoelectric-actuated compliant platform system, which can provide an effective solution when analyzing the micro-/nano system.
Highlights
With the rapid development of micro-/nanotechnology, piezoelectric-actuated, flexure hinge-based compliant platforms are used across a wide spectrum of fields, including nanopositioning systems [1,2], ultra-precision manufacturing [3,4], scanning probe microscopes [5], and biomedical cell micro-manipulation [6,7]
The reasons for the promise of these applications are mainly attributed to the combination of the piezoelectric actuator (PZT) and flexure hinge-based compliant mechanisms
Goldfarb et al [20] proposed a model in which a lumped-parameter energy-based representation was introduced to describe the static and dynamic behaviors of the PZT, which has been widely used for modeling the piezoelectric-actuated positioning system [21,22]
Summary
With the rapid development of micro-/nanotechnology, piezoelectric-actuated, flexure hinge-based compliant platforms are used across a wide spectrum of fields, including nanopositioning systems [1,2], ultra-precision manufacturing [3,4], scanning probe microscopes [5], and biomedical cell micro-manipulation [6,7]. Goldfarb et al [20] proposed a model in which a lumped-parameter energy-based representation was introduced to describe the static and dynamic behaviors of the PZT, which has been widely used for modeling the piezoelectric-actuated positioning system [21,22]. The dynamic modeling approaches of compliant mechanisms were studied by combining PRB model theory and Lagrange’s equation [26,27]. The mechatronics model of a piezoelectric-actuated micro-/nano compliant platform system is established based on the bond graph approach. By simulating the bond graph model, the kinematic and dynamic performances of the interactions between the PZT and the compliant platform are investigated. AAss ddeeppiicctteedd iinn FFiigguurree 11,, tthhee ccoommpplliiaanntt ppllaattffoorrmm ssyysstteemm ccoonnssiissttss ooff tthhee ppiieezzooeelleeccttrriicc ppaarrtt aanndd tthhee mmeecchhaanniiccaall ppaarrtt. TThheeyy aarree tthheenn ccoouupplleedd ttooggeetthheerr iinn sseerriieess oorrppaarraalllleellbbyyaaddddininggsosommeesisginganlafll oflwows asnadndpopwoewrebrobnodnsdtos toobtoabintatihnethboenbdongdragprhamphodmeol dofelthoef wthheowlehcoolme cpolmianptlipanlattfpolramtfosrymstesyms.tem
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